Cost savings by collecting diverted liquid precursor

Minimizing cycle of vacuum pump overhaul

• Inlet Size / Outlet Size

:

1/2" / 1/4"

• Trap Type

:

Vertical

• Trap Weight

:

31.57Kg

• Trap Dimension

:

Φ216.3 X 360H

• Trap Material

:

SUS304L, SUS316L

• Water Supply Tube Dimemsion

:

1/4", 3/8" SUS Pipe

• Quick Connector

:

3/8" Plug, 3/8" Socket

• PCW Range

:

PCW 2Kg/cm²~8Kg/cm² (3.5L/min.)

• Pressure Range

:

1mTorr~760Torr

• Gas Flow Range

:

Max 500slm