TRAP

“Using a new innovation of dual cooling mechanism,
throughput of CVD systems increased rapidly”

Increasing runtime of TiN CVD systems by rapid capturing of byproducts

Improving Scrubber PM cycle time

Preventing clogging problems in fore-line and exhaust line

Reducing Dry Vacuum Pump downtime

MLB3550VC

• Inlet Size / Outlet Size

:

NW50

• Trap Type

:

Vertical

• Trap Weight

:

43Kg

• Trap Dimension

:

Φ320 X 395H

• Trap Material

:

SUS304L, SUS316L

• Heater Temp

:

200°C~700°C

• Power Box Dimension

:

98W X 45D X 60H

• Power Supply

:

208V, 1¢ + GND(3wire), 1.5Kw, 7.4Amp

• Water Supply Tube Dimemsion

:

1/4", 3/8" SUS Pipe

• Quick Connector

:

3/8" Plug, 3/8" Socket

• PCW Range

:

PCW 2Kg/cm²~8Kg/cm² (3.5L/min.)

• Pressure Range

:

1mTorr~760Torr

• Gas Flow Range

:

Max 500slm

MLBTR-50V1

• Inlet Size / Outlet Size

:

NW50

• Trap Type

:

Vertical

• Trap Weight

:

52Kg

• Trap Dimension

:

300W X 480D X 390H (Carrier)

• Trap Material

:

SUS304L, SUS316L

• Heater Temp

:

200°C~700°C

• Power Box Dimension

:

98W X 45D X 60H

• Power Supply

:

208V, 1¢ + GND(3wire), 1.5Kw, 7.4Amp

• Water Supply Tube Dimemsion

:

1/4", 3/8" SUS Pipe

• Quick Connector

:

3/8" Plug, 3/8" Socket

• PCW Range

:

PCW 2Kg/cm²~8Kg/cm² (3L/min.)

• Pressure Range

:

1mTorr~760Torr

• Gas Flow Range

:

Max 500slm

Result from Innovative Trap System