DRY CLEAN

Provano offers dry clean services for ceramic and metal parts as well as pedestals used for DPS, CVD, Etch, HDP, Sputtering, ION implantation systems.

Ceramic Dome, Focus Ring, Capture Ring, Gas Nozzle, Pedestal,Ceramic Fork, etc.

Advantage of Dry Clean

Low Particle and Contamination

Less Damage and longer life time

Low cost value

Safe and No chemicals used

A sample of used Dry Clean technology for Ceramic Parts

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