PARTS REFURBISHMENT/REPAIR

Provano Engineering provides fast and quality repair services for following units. If you are seeking other units that are not on this list, please contact us.

Novellus/Varian

AMAT

RF Generators

Matching Networks

CONMAG I

SBC V-452 CPU Board

[AE] RFDS, RFG1250

[AE] RF Matching Network

CONMAG II

Source Magnet (A & G-Type)

[AE] RFG2000-2V

[Applied Material]
P5000 ETCH Match Networ

Quantum Source

Cables

[AE] RFG3000

[Applied Material]
P5000 CVD Match Network

Mini Quantum

[AE] RFG5500

[ENI] MWD-25LD

Bearing Seal Assembly

[Comdel] CLF5000

[RF Services Inc] RFS1000

Heater Assembly

[Comdel] CPS-11001, CPS-1001s
(13.56MHZ/60MHZ)

[Trazar] AMU Series
(AMU1, AMU2... etc.)

3000 Series Heater Assembly

[Comdel] CX-600B

Transfer Servo Controller

[ENI] PL2-HF

DCM Servo Controller

[ENI] OEM-50

Deposition Source Controller

[ENI] OEM-6

Planar Source Controller

[ENI] OEM Series
(OEM-6, OEM-12, ACG-10, LPG...)

Coaxial Feed thru Assembly

[Daihen] MFG-20SA3

Mag 7 Brooks Robot

[RFPP] RF5S

RF Match Box Assembly

[RFPP] RF10S

RF Generator

[RFPP] LF10A

[RFPP] RF50S